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 IMAGE SENSORS
FT 18 Frame Transfer CCD Image Sensor
Product specification File under Image Sensors 2000 January 7
Philips Semiconductors
TRAD
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
* * * * * * * * * * * * * * *
2/3-inch optical format 1M active pixels (1024H x 1024V) Progressive scan Excellent anti-blooming Variable electronic shuttering Square pixel structure Hor. and Vert. binning 100% optical fill factor High dynamic range (>60dB) High sensitivity Low dark current and fixed pattern noise Low read-out noise Data rate up to 40 MHz Frame rate up to 30 Hz Mirrored read-out option Description
The FT 18 is a monochrome progressive-scan frame-transfer image sensor offering 1K x 1K pixels at 30 frames per second through a single output buffer. The combination of high speed and a high linear dynamic range (>10 true bits at room temperature without cooling) makes this device the perfect solution for high-end real time medical X-ray, scientific and industrial applications. A second output can be used for mirrored images. The device structure is shown in figure 1.
Device structure
Optical size: Chip size: Pixel size: Active pixels: Total no. of pixels: Optical black pixels: Timing pixels: Dummy register cells: Contour lines: Optical black lines: 7.68 mm (H) x 7.68 mm (V) 8.9 mm (H) x 17.0 mm (V) 7.5 m x 7.5 m 1024 (H) x 1024 (V) 1072 (H) x 1048 (V) Left: 20 Right: 20 Left: 4 Right: 4 Left: 7 Right: 7 Bottom: 1 Top: 4 Bottom: 11 Top: 8
8 black lines 4 contour 8 black line lines s
Image Section
1024 active lines 20 pix
20 1024 active pixels pix 4 1 contour line
11 black lines
2096 lines
Storage Section
Output 7 amplifier
1072 cells Output register
7
Figure 1 - Device structure
2000 January
2
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Architecture of the FT 18
The FT18 consists of a shielded storage section and an open image section. Both sections have the same structure with identical cells and properties. The only difference between the two sections is the optical light shield. The optical centres of all pixels in the image section form a square grid. The charge is generated and integrated in this section. The image section is controlled by four image clocks (A1 to A4). After integration, the image charge is completely shifted to the storage section. The integration time is electronically controlled by charge reset (CR). The storage section is controlled by four storage clocks (B1 to B4). An output register is located below the storage section for read-out. The output register has buffers at both ends. This allows either normal or mirrored read-out. Transport of the pixels in the output register is controlled by three register clock phases (C1 to C3). The register can be used for vertical binning. Horizontal binning can be achieved by summing pixel charges under the floating diffusion. More information can be found in the application note. Figure 2 shows the detailed internal structure.
IMAGE SECTION Image diagonal Aspect ratio Active image width x height Total width x height Pixel width x height Geometric fill factor Image clock pins Capacity of each clock phase Number of active lines Number of contour lines Number of black lines Total number of lines Number of active pixels per line Number of overscan (timing) pixels per line Number of black reference pixels per line Total number of pixels per line 10.9 mm 1:1 7.680 x 7.680 mm2 8.040 x 7.860 mm2 7.5 x 7.5 m2 100% A1, A2, A3, A4 <3.75nF per pin 1024 4 (top) + 1 (bottom) 8 (top) + 11 (bottom) 1048 1024 8 (2x4) 40 (2x20) 1072
Storage width x height Cell width x height Storage clock phases Capacity of each B phase Number of cells per line x number of lines
STORAGE SECTION 8.040 x 7.860 mm2 7.5 x 7.5 m2 B1, B2, B3, B4 <4.1nF per pin 1072 x 1048
OUTPUT REGISTER Output buffers (three-stage source follower) Number of registers Number of register cells below storage Number of extra cells to output Output register horizontal transport clock pins Capacity of each C-clock phase Overlap capacity between neighbouring C-clocks Reset Gate clock phases Capacity of each RG 2 1 (bidirectional below storage) 1072 2x7 3 (C1..C3) <85pF per pin <35pF 2 pins (RGL, RGR) <15pF
2000 January
3
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
A2 A3 A4 A1
A2 A3 A4 A1
12 lines
A2 A3 A4 A1 A2 A2 A3 A4 A1 A2 A3 A4
One Pixel
A3 A4 A1
A2 A3 A4 A1 A2 A3 A4 A1
1K active images lines
IMAGE
A1
A2 A3 A4 A1 A2 A3 A4 A1
A2 A3 A4 A1 B2 B3 B4 B1
12 lines FT CCD
A2 A3 A4 A1 B2 B3 B4 B1
B2 A1 B3 B4 B1 B2 B3 B4 B1
B2 A1 B3 B4 B1 B2 B3 B4 B1
STORAGE
1048 storage lines
B2 A1 B3 B4 B1 B2 B3 B4 B3
B2 A1 B3 B4 B1 B2 B3 B4 B3
B2 A1 B3 B4 B1 C2 C1 C3 C2 C1 C3 C2 C1 C3 C2 C1 C3 C2 C1 C3 C2 C1 C3 C2 C1 C3 C2 C1 C3 C2 C1 C3
B2 A1 B3 B4 B1 C2 C1 C3 C2 C1 C3 C2 C1 C3
OUTL
OG C3
OUTR
OG
column 1 7 extra cells 20 black & 4 timing columns
column 24+1
column 24+1K
column 24+1K+24 4 timing & 20 black columns 7 extra cells
1K image pixels
A1, A2, A3, A4: clocks of image section B1, B2, B3, B4: clocks of storage section C1, C2, C3: clocks of horizontal register OG: output gate
Figure 2 - Detailed internal structure
2000 January
4
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Specifications
Absolute Maximum Ratings GENERAL: storage temperature ambient temperature during operation voltage between any two gates DC current through any clock (absolute value) OUT current (no short circuit protections) VOLTAGES IN RELATION TO VNS: VPS, SFS SFD RD All other pins VOLTAGES IN RELATION TO VPS: VNS SFD, RD SFS All other pins DC Conditions1 VNS2 VPS SFD SFS VCS OG RD N substrate P substrate Source Follower Drain Source Follower Source Current Source Output Gate Reset Drain Min. Max. Unit
-55 -40 -20 -0.2 0
+80 +60 +20 +0.2 6
C C V A mA
-30 -8 -15 -32 -0.5 +0 -8 -20 Min. 16 2 18 -2 3 12
+0.5 +8 +0.5 +0.5 +30 +30 +8 +20 Typical adjusted 4 20 0 0 5.4 13 Max. 24 6 22 3 8 15
V V V V V V V V Unit V V V V V V V
AC Clock Level Conditions1 IMAGE CLOCKS: A-clock swing A-clock low level Charge Reset (CR) level on A-clocks 3 Charge Pump (CP) level on A- clocks STORAGE CLOCKS (duty cycle=5/8): B-clock swing B-clock low level OUTPUT REGISTER CLOCKS (duty cycle=1/2): C-clock swing C-clock low level OTHER CLOCKS: Reset Gate (RG) swing Reset Gate (RG) low level
1 2
Min.
Typical
Max.
Unit
9.5 9.5 -
10 0 -5 0 10 0 5 3
-
V V V V V V V V
-
10 1
12 -
V V
All voltages in relation to SFS. To set the VNS voltage for optimal Vertical Anti-Blooming (VAB), it should be adjustable between minimum and maximum values. 3 Guaranteed charge reset requires the CR voltage to last at least 1.2s.
2000 January
5
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Timing diagrams (for default operation)
AC Characteristics Horizontal frequency (1/Tp) Vertical frequency Min. Typical 36 750 Max. 40 833 Unit MHz kHz
Line Timing
Phase or pixel count 1100 1110 1120 1130 1140 1150 1/(36MHz) = 27.8ns 0 10 20 30 40 50 60 70 80 90 100 110 120
One charge pumping cycle of the image gates (during line blanking), shifting the charge of one line back and forth H L H A2 L H A3 L H A4 L A1
19 28 37 46 55
64
One cycle of the storage gates (during line blanking), moving one line from storage to output register 32 62 H B2 L 26 44 H B3 L 38 56 H B4 L 20 50 H B1 L
SSC PB BLC CB CR
H L H L H L H L H L
0 Start-Stop C-clocks 0 Pre-Blanking 0 Black Level Clamp 1131 Composite Blanking 19 Charge Reset 1.25 microseconds 64 C clocks stopped for 2 microseconds
72 79 79
1080 pixels until 1152
99
Pixel Timing
Tp/6 = (1/36MHz)/6 = 4.63ns Tp = 1/36MHz = 27.8ns
dummy 1
.......
dummy 7
black 1
.......
black 20
timing 1
.......
timing 4
pixel 1
.......
pixel 1024
timing 1
.......
timing 4
black 1
.......
black 20
dummy 1
SSC
H L H C1 L H C2 L H C3 L H RG L
In this figure, charge is transported to the left output buffer (normal readout) by moving it from C1 to C2 to C3 etc. By exchanging the timing of C1 and C2, charge will be transported to the right output buffer (mirrored readout).
Figure 3 - Line and pixel timing diagrams
2000 January
6
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Frame Timing
Frame Transfer (FT): charge image (all lines) is moved from image to storage by the image and storage clocks together (see Figure "Frame Shift Timing").
internal LINE counter
1109 1110 1111 1112 1113 1114 1115 1116 ...... 1119 1120 1121 1122 ...... 1250
1
......
26
27
......
70
71
72
73
74
75
76
77
78
79
80
81
82
83
......
86
87
88
video 1024 D D B B BLC BLC B B D D E line no. Charge Pump (CP): a measure to reduce dark current due to interface states. For details see figure 3 "Line and pixel timing diagrams". H A1 L H A2 L H A3 L H A4 L Hustle: moving the charge packets of one line from storage to the output register. For details see figure 3 "Line and pixel timing diagrams". B1 B2 B3 B4 H L H L H L H L Linetime: the C-clocks shift charge packets one-by-one to the selected output buffer. For details see figure 3 "Line and pixel timing diagrams".
E
E
E
E
B
B
BLC BLC B
B
D
D
C
C
1
2
By adding one CR-pulse during the horizontal blanking, the effective integration time is decreased: "electronic shuttering"
SSC CR BLC PB CB
H L H L H L H L H L
CR before nominal integration Black-Level Clamp (BLC): the video processing clamps the black lines to determine its output zero-level.
Frame Shift Timing
Tp=1/(36MHz) = 27.8ns A1 A2 A3 A4 H L H L H L H L 1 48 Tp 2 750kHz 1047 1048
B1 B2 B3 B4
H L H L H L H L
1
2
1047
1048
30Tp 18Tp for all A and B clocks, duty cycle = 5/8
Figure 4 - Frame timing diagrams
2000 January
7
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Performance
The performance of the FT 18 is described for modes of operation with 25 frames/sec or 30 frames/sec respectively. Measurements for the FT 18 are done under the following circumstances (values in brackets apply for the 30 frames/sec mode): * VNS is adjusted as low as possible while maintaining proper Vertical Anti-Blooming. * Integration takes place under 2 gates with 10V clock swing during 40ms (33.33ms) * The vertical transport or frame shift frequency equals 750kHz (714kHz). * The horizontal transport or read-out frequency equals 36MHz (40MHz). * The RMS read-out noise of the output buffers and the FPN are measured in the bandwidth 0.1-18MHz (0.1-20MHz). * The performance in dark is given at a temperature of 318K / 45C. Note that the dark current decreases by a factor of two for every decrease of temperature of approximately 10C.
Linear / Saturation Overexposure over entire area while maintaining good VAB Vertical resolution (MTF) @ 67 lp/mm Quantum efficiency @ 450 nm Quantum efficiency @ 520 nm Quantum efficiency @ 600 nm Quantum efficiency @ 800 nm (near IR) Image lag White Shading 1 Random Non-Uniformity (RNU)
2
Min. 300 25 10 21 18 5 120 40 45 90
Typical 11 22 19 0 1.0 45 -
Max. 2.5 1.4 -
Unit lux % % % % % % % % kel. kel. kel. kel.
Full-well capacity Floating Diffusion (FD) Full-well capacity saturation level (Q Full-well capacity saturation level (Q Full-well capacity saturation level (Q 25 frames/sec mode only Sensitivity @ 3200K without IR cut-off filter Smear without shutter 5 Dynamic range RMS read-out noise 30 frames/sec mode only Sensitivity @ 3200K without IR cut-off filter Smear without shutter Dynamic range RMS read-out noise
5
) 3 image max
max
) storage
) output register 4 max
5.6 60 -
5.8 63.8 29
0.39 38
kel/lux % dB el
4.6 60 -
4.8 63.5 30
0.40 40
kel/lux % dB el
1 2 3
White Shading is defined as the ratio of the one- value of an 8x8 pixel blurred image (low-pass) to the mean signal value.
Random Non Uniformity is defined as the ratio of the one- value of the highpass image to the mean signal value at nominal light. Q max is determined from the lowpass filtered image. 4 Q max of the output register may be increased up to 200kel. In this case the charge packets of the pixels may get mixed in the output register during horizontal transport. This may reduce the number of times that the output register needs to be read out if lines are read out solely to be dumped. 5 The smear condition is: overexposure with a spot with a height of 10% of the image height (approx. 100 lines).
2000 January
8
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
30
Quantum efficiency (%)
20
10
0 400 500 600 700 800 900
Wavelength (nm)
Figure 5 - Quantum efficiency versus wavelength
2000 January
9
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Output Buffers
Min.
Typical
Max.
Unit
Conversion factor Supply current Bandwidth Output impedance buffer (Rload = 3.3k, Cload = 2pF)
8.5
10 4 110 400
11.5
V/el. mA MHz
Dark Condition
Min.
Typical
Max.
Unit pA/cm2 el
Dark current Black level offset
1
-
-
240 25
Dark condition at 25 frames/sec: Average dark signal Shot noise of the dark current Horizontal shading Vertical shading Fixed Pattern Noise
2
in dark (FPN) -
56 -
67 10 25 66 19
el el el el el
Dark condition at 30 frames/sec: Average dark signal Shot noise of the dark current Horizontal shading Vertical shading Fixed Pattern Noise
2
in dark (FPN) -
47 -
56 10 25 56 19
el el el el el
1 2
Black level offset is defined as the difference in dark signal of a black refence line and an active image line. FPN is the one- value of the highpass image.
2000 January
10
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Application information
Current handling One of the purposes of VPS is to drain the holes that are generated during exposure of the sensor to light. Free electrons are either transported to the VRD connection and, if excessive (from overexposure), free electrons are drained to VNS. No current should flow into any VPS connection of the sensor. During high overexposure a total current 10 to 15mA through all VPS connections together may be expected. The PNP emitter follower in the circuit diagram (figure 6) serves these current requirements.
VNS drains superfluous electrons as a result of overexposure. In other words, it only sinks current. During high overexposure a total current of 10 to 15mA through all VNS connections together may be expected. The NPN emitter follower in the circuit diagram meets these current requirements. a high-frequency transistor. Mount the base of this transistor as close as possible to the sensor and keep the connection between the emitter and the next stage short. The CCD output buffer can easily be destroyed by ESD. By using this emitter follower, this danger is suppressed; do NOT reintroduce this danger by measuring directly on the output pin of the sensor with an oscilloscope probe. Instead, measure on the output of the emitter follower. Slew rate limitation is prevented by avoiding a too-small quiescent current in the emitter follower; about 10mA should do the job. The collector of the emitter follower should be decoupled properly to suppress the Miller effect from the base-collector capacitance. A CCD output load resistor of 3.3k typically results in a bandwidth of 110MHz. The bandwidth can be enlarged to about 130MHz by using a resistor of 2.2k instead, which, however, also enlarges the on-chip power dissipation.
Decoupling of DC voltages All DC voltages should be decoupled with a 100nF decoupling capacitor. This capacitor must be mounted as close as possible to the sensor pin. Further noise reduction (by bandwidth limiting) is achieved by the resistors in the connections between the sensor and its voltage supplies. The electrons that build up the charge packets that will reach the floating diffusions only add up to a small current, which will flow through VRD. Therefore a large series resistor in the VRD connection may be used. Outputs To limit the on-chip power dissipation, the output buffers are designed with open source outputs. Outputs to be used should therefore be loaded with a current source or more simply with a resistance to GND. In order to prevent the output (which typically has an output impedance of about 400) from bandwidth limitation as a result of capacitive loading, load the output with an emitter follower built from
Device protection The output buffers of the FT 18 are likely to be damaged if VPS rises above SFD or RD at any time. This danger is most realistic during power-on or power-off of the camera. The RD voltage should always be lower than the SFD voltage.
Never exceed the maximum output current. This may damage the device permanently. The maximum output current should be limited to 6mA. Be especially aware that the output buffers of these image sensors are very sensitive to ESD damage. Because of the fact that our CCDs are built on an n-type substrate, we are dealing with some parasitic npn transistors. To avoid activation of these transistors during switch-on and switch-off of the camera, we recommend the application diagram of figure 6.
2000 January
11
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Device Handling
An image sensor is a MOS device which can be destroyed by electrostatic discharge (ESD). Therefore, the device should be handled with care. Always store the device with short-circuiting clamps or on conductive foam. Always switch off all electric signals when inserting or removing the sensor into or from a camera (the ESD protection in the CCD image sensor process is less effective than the ESD protection of standard CMOS circuits). Being a high quality optical device, it is important that the cover glass remain undamaged. When handling the sensor, use fingercots. When cleaning the glass we recommend using ethanol (or possibly water). Use of other liquids is strongly discouraged: * if the cleaning liquid evaporates too quickly, rubbing is likely to cause ESD damage. * the cover glass and its coating can be damaged by other liquids. Rub the window carefully and slowly. Dry rubbing of the window may cause electro-static charges or scratches which can destroy the device.
VSFD
BC 850C VNS 0.5-1mA
keep short <10mm!
keep short! BFR 92A output for preprocessing 10mA <7pF! 100nF
OUT 100
100nF
BAT74
BC 850C
3.3k
1k
SFD
100nF
0.5-1mA
27 BAT74 Schottky!
0.5-1mA BC 860C
VPS
15 BAT74 Schottky! 10k
VCS
Figure 6 - Application diagram to protect the FT 18
100nF 100nF
100nF
10k
VRD
VOG
100nF
10k
2000 January
12
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Pin configuration
The FT18 is mounted in a ceramic DIL 32-pin package. The position of pin 1 is marked with a white dot on top of the package.
Pinning Symbol VNS VNS VPS VPS SFDL SFDR SFSL SFSR VCSL VCSR OGL OGR RDL RDR A1 A2 A3 A4 B1 B2 B3 B4 C1 C1 C2 C2 C3 C3 RGL RGR OUTL OUTR Name N substrate N substrate P well P well Source Follower Drain Left Source Follower Drain Right Source Follower Source Left Source Follower Source Right Current Source Gate Left Current Source Gate Right Output Gate left Output Gate Right Reset Drain Left Reset Drain Right Image Clock (Phase 1) Image Clock (Phase 2) Image Clock (Phase 3) Image Clock (Phase 4) Storage Clock (Phase 1) Storage Clock (Phase 2) Storage Clock (Phase 3) Storage Clock (Phase 4) Register Clock (Phase 1) Register Clock (Phase 1) Register Clock (Phase 2) Register Clock (Phase 2) Register Clock (Phase 3) Register Clock (Phase 3) Reset Gate Left Reset Gate Right Output Left Output Right Pin # 12 21 5 28 9 24 8 25 7 26 6 27 11 22 3 4 30 29 1 2 32 31 14 19 15 18 16 17 13 20 10 23
2000 January
13
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16
B1 B2 A1 A2 VPS OGL VCSL SFSL SFDL OUTL
B4
B3
32 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17
TOP
B4 A3 A4 VPS
IMAGE
OGR VCSR SFSR SFDR OUTR
STORAGE
B4
RDL VNS RGL C1 C2 C3
RDR VNS RGR C1
B1
B1
FT18
C2 C3
Figure 7 - FT18 pin configuration (top view)
2000 January
14
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
Package information
4.92 0.2
9.575 0.2
7.68 0.2
29.70 0.3
25.4 0.1 0.78 0.05
3.3 0.2 4.5 0.3
Angle of rotation: less than 10 Sensor flatness: < 7 m (P-V) Cover glass: Corning 7059 Thickness of cover glass: 0.8 0.05 Refractive index: nd = 1.53 Single sided AR coating inside, 21% reflection (430-660 nm)
All drawing units are in mm.
1.778 0.13 0.48 0.05
0.762 0.07 2.868 0.29 7.747 0.2
3.317 0.2 B
1 / 100 B
15.494 0.25 1.090 0.11 0.665 0.07 2.986 0.29 1.016 0.10 Image area 0.005 15.24 0.25 15 0.1
Cover glass Anti-reflex coating
Figure 8 - Mechanical drawing of the FT 18 package
0.08 +0.07 -0.02 Glue
0.8 0.05
0.725 0.05 Crystal + Glue
Sensor crystal
1.4 / 100
0.25 +0.05 -0.02
2000 January
15
Philips Semiconductors
Product specification
Frame Transfer CCD Image Sensor
FT 18
The sensor can be ordered using the following code:
FT18 sensors
Description
FT18/TG FT18/IG FT18/HG FT18/SG
Quality Grade
Test grade Industrial grade High grade Selected grade
Order Code
9922 157 32031 9922 157 32021 9922 157 32011 9922 157 32001
You can contact the Image Sensors division of Philips Semiconductors at the following address: Philips Semiconductors Image Sensors Internal Postbox WAG-05 Prof. Holstlaan 4 5656 AA Eindhoven The Netherlands phone fax +31 - 40 - 27 44 400 +31 - 40 - 27 44 090
www.semiconductors.philips.com/imagers/
lmtb
Philips Semiconductors
TRAD
Philips reserves the right to change any information contained herein without notice. All information furnished by Philips is believed to be accurate. (c) Philips Electronics N.V. 2000 9922 157 32001
Order codes


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